Advantages of Silicon Carbide Boat
- High purity, the purity of the semi-finished product ≥99.9%
- The purity of the CVD coating is high, up to 99.99987%
- High-dimensional accuracy, capable of precisely positioning and fixing wafers
- Good chemical stability, not easy to react with other substances
- Smooth surface to prevent particle contamination
- High thermal conductivity, up to 163 W/m・K
Silicon Carbide Boat of Different Types
NKM provide various processes and shapes of silicon carbide boats for moving wafers according to your furnace characteristics.
High density, typically 3.04g/cm³, facilitates wafer loading and unloading.
Max working temperature is 1620℃. Provide dimensional accuracy and surface quality.
Vertical design carries more wafers in a limited space. Suitable for processing wafers in large quantities.
High space utilization rate can improve the production capacity of equipment.
Why Choose Newthink Silicon Carbide Boat?
The ultra-high purity silicon carbide boat produced by Newthink has been recognized by customers and successfully verified. NKM consistently provide precise and high-quality products and services.
We have experience in vertical and horizontal wafer boat production, and have exported in large quantities.
Professional team manufactures silicon carbide boats that meet various precision requirements according to customer drawings and requirements.
For customers who want to test the quality, we can provide free sample blocks for customers to test.
Before delivery, we will inspect the semi-finished product and CVD coating and provide a test report.
Passed ISO certification, strictly controlled every process to ensure stable and reliable product quality.
We have ultra-high purity recrystallization and reaction sintering processes, mature molding processes, CNC processing capabilities, sintering technology and cleaning capabilities.
Silicon Carbide Boat Production Workshop
Newthink has 14 years of experience in advanced ceramic production. For the semiconductor industry, we can provide a complete set of customized solutions, including high-purity raw materials, mature molding processes, CNC processing capabilities, sintering technology, cleaning capabilities, CVD coating technology and product inspection capabilities. The strict production process can ensure that customers are provided with products of guaranteed quality and quantity.
Meet Us at Exhibitions and Factory Visits
Meet Us at Exhibitions
Newthink actively participates in major industrial and advanced ceramics exhibitions worldwide throughout the year, such as Italy, Germany, Japan, and Vietnam, meeting directly with our customers.
Factory Visits
We welcome new and old customers to visit our factory, check each of our production processes, witness our control of quality and discuss our future cooperation. Through frequent interactions and strong relationships built at these global events and visits, we’ve earned deep trust from clients in over 40 countries and regions.
Resource
Download detailed product specifications, technical data and more. Access all the information you need.
Parameters of Silicon Carbide Boat
The GDMS report of the silicon carbide boat is as follows.
- Datasheet
| Element | Content | Element | Content |
| Li | < 0.01 | Ag | < 0.1 |
| Be | < 0.01 | Cd | < 0.1 |
| B | 0.01 | In | Auxiliary Electrode |
| C | Principal Component | Sn | < 0.5 |
| F | < 1 | Sb | < 0.1 |
| Na | 0.06 | Te | < 0.5 |
| Mg | < 0.05 | I | < 20 |
| Al | 0.01 | Cs | < 5 |
| Si | Principal Component | Ba | < 0.05 |
| P | < 0.05 | La | < 1 |
| S | 0.38 | Ce | < 0.05 |
| Cl | < 0.05 | Pr | < 0.05 |
| K | < 0.1 | Nd | < 0.05 |
| Ca | < 0.1 | Sm | < 0.05 |
| Sc | < 0.01 | Eu | < 0.05 |
| Ti | < 0.01 | Gd | < 0.05 |
| V | < 0.01 | Tb | < 0.05 |
| Cr | < 0.05 | Dy | < 0.05 |
| Mn | < 0.05 | Ho | < 0.05 |
| Fe | < 0.05 | Er | < 0.05 |
| Co | < 0.01 | Tm | < 0.05 |
| Ni | 0.03 | Yb | < 0.05 |
| Cu | < 0.05 | Lu | < 0.05 |
| Zn | < 0.1 | Hf | < 0.05 |
| Ga | < 0.05 | Ta | < 10 |
| Ge | < 0.1 | W | < 0.05 |
| As | < 0.05 | Re | < 0.05 |
| Se | < 0.5 | Os | < 0.01 |
| Br | < 0.1 | Ir | < 0.01 |
| Rb | < 0.1 | Pt | < 1 |
| Sr | < 0.1 | Au | < 0.5 |
| Y | < 0.1 | Hg | < 0.1 |
| Zr | < 0.05 | Tl | < 0.05 |
| Nb | < 0.05 | Pb | < 0.1 |
| Mo | < 0.05 | Bi | < 0.01 |
| Ru | < 0.05 | Th | < 0.005 |
| Rh | < 0.05 | U | < 0.005 |
| Pd | < 0.1 |
Related Products
Device for fixing and moving objects, can be used with robots, has good thermal stability.
Guide RailPositioning and guiding silicon wafers or other materials with precise size and shape.
Wafer ForkTransporting wafers or other precision components in semiconductor equipment.
Wafer boats typically have vertical and horizontal structures. They are mainly used to transport and position wafers. They are an important process equipment that is extensively used in semiconductor manufacturing and the solar photovoltaic industry. Early quartz wafer boats are mostly made of quartz, but they have increasingly been substituted by silicon carbide wafer boats.
The service life of silicon carbide crystal boats is very high because silicon carbide has excellent properties such as resistance to high temperature, corrosion, mechanical strength, and excellent chemical stability.
The service life of silicon carbide boats can reach up to around 1000-3000 times under normal process conditions in semiconductor manufacturing and other industries. If applied in some special processes with less loss to the crystal boat, its lifetime can even be more than 3000 times after good maintenance. In some harsh process conditions, for instance, ultra-high temperature or harsh chemical corrosion environment, the lifetime of silicon carbide wafer boat may be reduced to 800-1500 times.
Silicon carbide boats will not contaminate wafers for the following reasons:
①High purity and low impurities: We control the purity strictly, including the blank purity and CVD purity.
②Good chemical stability: Silicon carbide (SiC) is chemically stable and can endure the corrosion of various chemical gases and reagents used in the process of making semiconductors.
③Cleaning before packaging: We will also conduct a cleaning procedure before packaging in order to preserve the smoothness and flatness of the surface of the boat.
④No particle shedding: Silicon carbide boats are tough and robust, structurally stable, and wear-resistant and particle-shedding-resistant under normal use.
Silicon carbide boats are more expensive than quartz wafer boats. However, silicon carbide boats are of long-term, low maintenance, good chemical stability, high mechanical strength, and high dimensional accuracy; thus, the overall cost is low.
Silicon carbide boats may deform or crack from extended exposure to very high temperatures. However, the risk is considerably less than when using other materials such as quartz or alumina. High-temperature strength and creep resistance of SiC allow it to maintain shape and stability even under heavy loads and multiple heating cycles. Improper use (e.g., exposure to excessive rated temperature, rapid cooling, or corrosive gas like fluorine) will cause fail.
Regarding SiC types, SSiC and RSiC, provide the best resistance to deformation and cracking. Avoid using RBSiC in ultra-high temp and fluorine environments. SiC boats can operate dependably in industrial production for years with proper selection, gradual heating and cooling and periodic inspection.
The lifetime of a Silicon Carbide Boat can range from one to over five years. The actual lifetime in use depends on three major factors: material, processing conditions, and maintenance.
① Material and Manufacturing: Utilizing high-purity and high-density SiC yields the best strength and resistance to corrosion. SSiC is the best performer in actual lifetime use. RSiC performs well under thermal shock. RBSiC is an economical one, however is not as stable in extremely heated applications or in a fluorine environment.
② Operating Conditions: Excessive use temperature, aggressive gases, such as fluorine or chlorine, and extremely quick heat or cool cycles all will hasten aging and cracking.
③ Maintenance and Handling: Be sure to use proper handling techniques. Small cracks or warping should be tackled sooner rather than later to prevent use failure when in operation.
① Careful and consistent cleaning: Make sure to let the SiC boat cool completely before cleaning it. Do not clean with metal brushes or abrasive scrubbing to avoid scratching the surface.
② Removal of stubborn deposits in a safe manner: For small deposits, use medium SiC sanding paper or polishing paste in DI water. For chemical stains, dilute acids are the only recommended cleaners (less than 10% HCl or HNO3). Rinse thoroughly and dry thoroughly, regardless of what cleansers you use.
③ Regular inspecting and storage: Regularly inspect the boat for cracks, warping or deformation. Do not place, store or transport boats on a flat surface that can cause stress or impact damage.
