Advantages of Silicon Carbide Boat
- High purity, the purity of the semi-finished product ≥9%.
- The purity of the CVD coating is high, up to 99.99987%.
- High-dimensional accuracy, capable of precisely positioning and fixing wafers.
- Good chemical stability, not easy to react with other substances.
- Smooth surface to prevent particle contamination.
- High thermal conductivity, up to 163 W/m・K.
Silicon Carbide Boat for Different Types
We can provide various processes and shapes of silicon carbide boats for moving wafers according to your furnace characteristics.
High density, typically 3.04g/cm³, facilitates wafer loading and unloading.
The maximum temperature resistance is 1620℃, which can easily ensure the dimensional accuracy and surface quality of the wafer boat.
The vertical design can carry more wafers in a limited space and is suitable for processing wafers in large quantities.
High space utilization rate can improve the production capacity of equipment.
Why Choose Newthink Silicon Carbide Boat?
The ultra-high purity silicon carbide boat produced by Newthink has been recognized by customers and successfully verified on the machine. We consistently provide customers with precise and high-quality products and services.
We have experience in vertical and horizontal wafer boat production, and have exported in large quantities.
Professional team manufactures silicon carbide boats that meet various precision requirements according to customer drawings and requirements.
For customers who want to test the quality, we can provide free sample blocks for customers to test.
Before delivery, we will inspect the semi-finished product and CVD coating and provide a test report.
Passed ISO certification, strictly controlled every process to ensure stable and reliable product quality.
We have ultra-high purity recrystallization and reaction sintering processes, mature molding processes, CNC processing capabilities, sintering technology and cleaning capabilities.
Silicon Carbide Boat Production Workshop
Newthink has 14 years of experience in advanced ceramic production. For the semiconductor industry, we can provide a complete set of customized solutions, including high-purity raw materials, mature molding processes, CNC processing capabilities, sintering technology, cleaning capabilities, CVD coating technology and product inspection capabilities. The strict production process can ensure that customers are provided with products of guaranteed quality and quantity.
Meet Us at Exhibitions and Factory Visits
Meet Us at Exhibitions
Newthink actively participates in major industrial and advanced ceramics exhibitions worldwide throughout the year, such as Italy, Germany, Japan, and Vietnam, meeting directly with our customers.
Factory Visits
We welcome new and old customers to visit our factory, check each of our production processes, witness our control of quality and discuss our future cooperation. Through frequent interactions and strong relationships built at these global events and visits, we’ve earned deep trust from clients in over 40 countries and regions.
Parameters of Silicon Carbide Boat
The GDMS report of the silicon carbide boat is as follows：
- Datasheet
| Element | Content | Element | Content |
| Li | < 0.01 | Ag | < 0.1 |
| Be | < 0.01 | Cd | < 0.1 |
| B | 0.01 | In | Auxiliary Electrode |
| C | Principal Component | Sn | < 0.5 |
| F | < 1 | Sb | < 0.1 |
| Na | 0.06 | Te | < 0.5 |
| Mg | < 0.05 | I | < 20 |
| Al | 0.01 | Cs | < 5 |
| Si | Principal Component | Ba | < 0.05 |
| P | < 0.05 | La | < 1 |
| S | 0.38 | Ce | < 0.05 |
| Cl | < 0.05 | Pr | < 0.05 |
| K | < 0.1 | Nd | < 0.05 |
| Ca | < 0.1 | Sm | < 0.05 |
| Sc | < 0.01 | Eu | < 0.05 |
| Ti | < 0.01 | Gd | < 0.05 |
| V | < 0.01 | Tb | < 0.05 |
| Cr | < 0.05 | Dy | < 0.05 |
| Mn | < 0.05 | Ho | < 0.05 |
| Fe | < 0.05 | Er | < 0.05 |
| Co | < 0.01 | Tm | < 0.05 |
| Ni | 0.03 | Yb | < 0.05 |
| Cu | < 0.05 | Lu | < 0.05 |
| Zn | < 0.1 | Hf | < 0.05 |
| Ga | < 0.05 | Ta | < 10 |
| Ge | < 0.1 | W | < 0.05 |
| As | < 0.05 | Re | < 0.05 |
| Se | < 0.5 | Os | < 0.01 |
| Br | < 0.1 | Ir | < 0.01 |
| Rb | < 0.1 | Pt | < 1 |
| Sr | < 0.1 | Au | < 0.5 |
| Y | < 0.1 | Hg | < 0.1 |
| Zr | < 0.05 | Tl | < 0.05 |
| Nb | < 0.05 | Pb | < 0.1 |
| Mo | < 0.05 | Bi | < 0.01 |
| Ru | < 0.05 | Th | < 0.005 |
| Rh | < 0.05 | U | < 0.005 |
| Pd | < 0.1 |
Related Products
Vacuum ChuckDevice for fixing and moving objects, can be used with robots, has good thermal stability.
Furnace TubeThe carrier that holds the heating element can evenly transfer heat.
Guide RailPositioning and guiding silicon wafers or other materials with precise size and shape.
Wafer ForkMainly used for transporting wafers or other precision components in semiconductor equipment.
Wafer boats typically have vertical and horizontal structures. They are of varying sizes and shapes based on the wafers’ or silicon wafers’ dimensions they are transporting. The most popular ones are 6-inch, 8-inch and 12-inch wafer boats. They are mainly used to transport and position wafers. They are an important process equipment that is extensively used in semiconductor manufacturing and the solar photovoltaic industry. Early quartz wafer boats are mostly made of quartz, but they have increasingly been substituted by silicon carbide wafer boats. The reason is that quartz wafer boats have relatively low mechanical strength and tend to break, while silicon carbide boats have high mechanical strength, high thermal conductivity and adequate chemical stability and are therefore the most ideal material available.
Generally, the lifetime of every product is not always a fixed number, and its value is heavily reliant on many variables, such as environment of use, quality of products, maintenance, etc. Quartz crystal boats’ lifetime is relatively low, approximately several hundred to thousands of times. If used under a relatively moderate process condition, such as in some typical semiconductor processes without the use of high temperature and corrosive chemicals, its lifespan may be prolonged to up to approximately 800-1200 times. However, if used under harsh conditions like high temperature and highly corrosive gases, quartz crystal boat lifetime can be reduced to 300-600 times. The service life of silicon carbide crystal boats is very high because silicon carbide (SiC) has excellent properties such as resistance to high temperature, corrosion, mechanical strength, and excellent chemical stability. The service life of silicon carbide crystal boats can reach up to around 1000-3000 times under normal process conditions in semiconductor manufacturing and other industries. If applied in some special processes with less loss to the crystal boat, its lifetime can even be more than 3000 times after good maintenance. In some harsh process conditions, for instance, ultra-high temperature or harsh chemical corrosion environment, the lifetime of silicon carbide wafer boat may be reduced to 800-1500 times.
Silicon carbide boats will not contaminate wafers for the following reasons:
①High purity and low impurities: We control the purity strictly, including the blank purity and CVD purity. The purity is higher, the lower the impurities will be in silicon carbide boats, and the wafers will not be contaminated in high temperature or chemical environments.
②Good chemical stability: Silicon carbide (SiC) is chemically stable and can endure the corrosion of various chemical gases and reagents used in the process of making semiconductors. These chemicals are hard to chemically react with, and they never contaminate the wafers.
③Cleaning before packaging: We will also conduct a cleaning procedure before packaging in order to preserve the smoothness and flatness of the surface of the boat.
④No particle shedding: Silicon carbide boats are tough and robust, structurally stable, and wear-resistant and particle-shedding-resistant under normal use. Silicon carbide boats, compared to some other materials, will not produce tiny particles due to surface wear, thereby avoiding physical contamination and wafer scratches caused by these particles.
Silicon carbide boats are more expensive than quartz wafer boats, so why silicon carbide boats? Silicon carbide boats are of long-term, low maintenance, good chemical stability, high mechanical strength, and high dimensional accuracy; thus, the overall cost is low.
