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Silicon Carbide Paddle

Silicon carbide paddle has high strength, light weight, large wafer loading capacity, can improve production efficiency, and the purity of the semi-finished product is ≥99.9%.

  • Good Corrosion Resistance SiC Paddle
  • Good Dimensional Stability SiC Paddle
  • High Strength Silicon Carbide Paddle
  • Large Wafer Loading Capacity SiC Paddle
  • Light Weight SiC Paddle
  • Good Corrosion Resistance SiC Paddle
  • Good Dimensional Stability SiC Paddle
  • High Strength Silicon Carbide Paddle
  • Large Wafer Loading Capacity SiC Paddle
  • Light Weight SiC Paddle

Advantages of Silicon Carbide Paddle

  • High strength to withstand high torque and dynamic loads.
  • Good corrosion resistance, excellent performance in strong acid and alkali environments (hydrofluoric acid concentration ≤ 20%).
  • Lightweight design, lighter weight can reduce the equipment driving load.
  • Good dimensional stability, no deformation at high temperature, ensuring high precision.
  • Smooth surface to prevent particle contamination.
  • CVD coating has high purity, up to 99.99987%.

Silicon Carbide Paddle for Different Industries

Silicon carbide paddles can be used in different industries. The following are the main industries of application.

Semiconductor and electronics industry
Semiconductor and electronics industry

Mainly used in semiconductor wafer loading systems, carrying and conveying silicon wafers in high temperature environments (1000-1300℃).

Photovoltaic industry
Photovoltaic industry

The characteristics of high temperature resistance and low impurities can help photovoltaic modules to be produced efficiently and with stable quality.

New energy industry
New energy industry

It can be used in the production of positive and negative electrode materials for lithium batteries.

Metallurgical industry
Metallurgical industry

Applicable to metallurgical and smelting equipment, with characteristics of high temperature resistance and high strength.

Why Choose Newthink Silicon Carbide Paddle?

Newthink’s ultra-high-purity silicon carbide paddles have been recognized by customers and successfully tested. We have exported to more than 10 countries.

Professional production team

We already have experience in cantilever beam production and have exported a large number.

High level of production capacity

The maximum length that can be produced is 5.5 meters.

Fast delivery capability

Our production is well organized and we can deliver fast for urgent orders.

Perfect quality management system

Passed ISO certification, strictly controlled every process to ensure stable and reliable product quality.

Professional quality inspection team

Before shipment, we will test each product to ensure product quality.

Advanced production facilities

We have ultra-high purity recrystallization and reaction sintering processes, mature molding processes, CNC processing capabilities, sintering technology, cleaning capabilities and CVD coating capabilities.

Silicon Carbide Paddle Production Workshop

Newthink has extensive experience in producing silicon carbide ceramics for the semiconductor and photovoltaic industries. Our production workshop is equipped with advanced molding equipment, sintering equipment, and CNC processing equipment. Professional quality inspectors conduct inspections after each product is produced to ensure that all products leaving the factory are qualified. After the inspection is completed, they will be individually packaged in the packaging area to ensure that they will not break during transportation.

Meet Us at Exhibitions

Meet Us at Exhibitions

Newthink actively participates in major industrial and advanced ceramics exhibitions worldwide throughout the year, such as Italy, Germany, Japan, and Vietnam, meeting directly with our customers.

What information does a custom silicon carbide (SiC) paddle need to provide

What information does a custom silicon carbide paddle need to provide?

To provide customized design recommendations, we generally require the following information from our clients:

  • What industry do you use it for? (Photovoltaic, semiconductor, new energy, metallurgy, etc.)
  • Are there any corrosive substances during use?
  • What is the highest temperature during use?
  • Is CVD coating necessary?
  • What problems are you currently experiencing?

Parameters of Silicon Carbide Paddle

The parameters of the silicon carbide paddles are as follows:

Item
Unit
Data
RBSiC(SiSiC)
Max service temperature1380
Densityg/cm33.02
Open porosity%0
Bending strength 20℃Mpa250
Bending strength 1200℃Mpa280
Modulus of elasticity 20℃Gpa330
Modulus of elasticity 1200℃Gpa300
Thermal conductivity 1200℃W/m.k45
Coefficient of thermal
expansion
K-lx10-64.5
HVkg/mm22115

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Can silicon carbide paddle replace quartz paddle for semiconductor wafer processing?

Silicon carbide cantilever paddle is the best choice to replace the quartz paddle for the following reasons:

①Performance: Silicon carbide cantilever paddle is more resistant to high temperature (still maintains 380MPa bending strength at 1350℃), has a low thermal expansion coefficient (4.0×10-6/°C), and is more resistant to acid and alkali corrosion, suitable for harsh environments.

②Cost-effectiveness: The price of the silicon carbide paddle is about 2-3 times that of the quartz paddle, but the service life is 4-8 times that of the quartz paddle, and the comprehensive maintenance cost is reduced by 30%.

③Production efficiency: Silicon carbide paddle has a long service life, can reduce the number of downtimes, increase production capacity, and is particularly suitable for large-scale continuous production of semiconductor wafer production lines.

Combining the above factors, more and more quartz paddles will be replaced by silicon carbide paddles.

What is the maximum operating temperature of the silicon carbide paddle?

According to the industry standard JB/T 13946-2020, the maximum operating temperature of the silicon carbide paddle is 1350°C. Even in a high temperature environment of 1350°C, its bending strength can still reach over 380MPa, which is significantly higher than the temperature resistance limit of the quartz paddle (about 1100°C). It is suitable for high-temperature processes such as semiconductor wafer processing and photovoltaic silicon wafer heat treatment.

How to avoid the breakage of silicon carbide paddle during use?

To prevent the silicon carbide paddle from breaking during use, it is necessary to control it multiple dimensions. First, high-purity raw materials (density ≥ 98%) must be selected, secondly, the structural design needs to be optimized (such as increasing the arc radius of the transition zone to R5mm or more, reducing stress concentration points), and finally, during installation, the horizontality and concentricity must be strictly calibrated (error < 0.15mm), rapid cooling and heating must be avoided, and surface cracks must be checked regularly to ensure stable operation in high temperature environments.

Why is the price of silicon carbide paddle higher than that of quartz paddle?

Silicon carbide paddles use high-purity silicon carbide (SiC) raw materials (purity > 99.9%), and their purification cost is more than 3 times that of quartz sand. In addition, the production process is complex, and the overall production cost is high. Silicon carbide paddles are mainly used in high-end fields such as semiconductor LPCVD and photovoltaic PECVD. The global annual demand is about 200,000 pieces, but the actual production capacity is very low, only 120,000 pieces. Quartz paddles have excess production capacity in the mid- and low-end markets, and price competition is fierce. Finally, the service life of silicon carbide paddles is high, which is 4-8 times that of quartz paddles. Therefore, considering the above factors, the price of silicon carbide paddles will be higher.

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